Research Progress of p-Type Oxide Thin-Film Transistors

被引:25
作者
Ouyang, Zhuping [1 ]
Wang, Wanxia [2 ]
Dai, Mingjiang [3 ]
Zhang, Baicheng [4 ]
Gong, Jianhong [2 ]
Li, Mingchen [1 ]
Qin, Lihao [1 ]
Sun, Hui [1 ]
机构
[1] Shandong Univ, Sch Space Sci & Phys, Weihai 264209, Peoples R China
[2] Shandong Univ, Sch Mech Elect & Informat Engn, Weihai 264200, Peoples R China
[3] Guangdong Acad Sci, Inst New Mat, Guangdong Prov Key Lab Modern Surface Engn Techno, Guangzhou 510651, Peoples R China
[4] Univ Sci & Technol Beijing, Beijing Adv Innovat Ctr Mat Genome Engn, Adv Mat & Technol Inst, Beijing 100083, Peoples R China
关键词
oxide Thin-Film transistors; orbital hybrid; preparation technology; nickel oxide; tin oxide; cuprous oxide; ELECTRICAL-PROPERTIES; COPPER-OXIDE; OPTOELECTRONIC PROPERTIES; OPTICAL-PROPERTIES; LOW-TEMPERATURE; A-IGZO; SUBSTRATE-TEMPERATURE; SIO2/SI SUBSTRATE; THERMAL-OXIDATION; TIN MONOXIDE;
D O I
10.3390/ma15144781
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The development of transparent electronics has advanced metal-oxide-semiconductor Thin-Film transistor (TFT) technology. In the field of flat-panel displays, as basic units, TFTs play an important role in achieving high speed, brightness, and screen contrast ratio to display information by controlling liquid crystal pixel dots. Oxide TFTs have gradually replaced silicon-based TFTs owing to their field-effect mobility, stability, and responsiveness. In the market, n-type oxide TFTs have been widely used, and their preparation methods have been gradually refined; however, p-Type oxide TFTs with the same properties are difficult to obtain. Fabricating p-Type oxide TFTs with the same performance as n-type oxide TFTs can ensure more energy-efficient complementary electronics and better transparent display applications. This paper summarizes the basic understanding of the structure and performance of the p-Type oxide TFTs, expounding the research progress and challenges of oxide transistors. The microstructures of the three types of p-Type oxides and significant efforts to improve the performance of oxide TFTs are highlighted. Finally, the latest progress and prospects of oxide TFTs based on p-Type oxide semiconductors and other p-Type semiconductor electronic devices are discussed.
引用
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页数:24
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