Thin film multilayer filters for solar EUV telescopes

被引:35
作者
Chkhalo, N. I. [1 ]
Drozdov, M. N. [1 ]
Kluenkov, E. B. [1 ]
Kuzin, S. V. [2 ]
Lopatin, A. Ya. [1 ]
Luchin, V. I. [1 ]
Salashchenko, N. N. [1 ]
Tsybin, N. N. [1 ]
Zuev, S. Yu. [1 ]
机构
[1] Russian Acad Sci, Inst Phys Microstruct, GSP 105, Nizhnii Novgorod 603950, Russia
[2] Russian Acad Sci, Lebedev Phys Inst, Leninskiy Prospekt 53, Moscow 119991, Russia
基金
俄罗斯基础研究基金会;
关键词
SPECTROMETER; CALIBRATION; OPTICS;
D O I
10.1364/AO.55.004683
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Al, with a passband in the wavelength range of 17-60 nm, and Zr, with a passband in the wavelength range of 6.5-17 nm, thin films on a support grid or support membrane are frequently used as UV, visible, and near-IR blocking filters in solar observatories. Although they possess acceptable optical performance, these filters also have some shortcomings such as low mechanical strength and low resistance to oxidation. These shortcomings hinder meeting the requirements for filters of future telescopes. We propose multilayer thin film filters on the basis of Al, Zr, and other materials with improved characteristics. It was demonstrated that stretched multilayer films on a support grid with a mesh size up to 5 mm can withstand vibration loads occurring during spacecraft launch. A large mesh size is preferable for filters of high-resolution solar telescopes, since it allows image distortion caused by light diffraction on the support grid to be avoided. We have investigated the thermal stability of Al/Si and Zr/Si multilayers assuming their possible application as filters in the Intergelioprobe project, in which the observation of coronal plasma will take place close to the Sun. Zr/Si films show high thermal stability and may be used as blocking filters in the wavelength range of 12.5-17 nm. Al/Si films show lower thermal stability: a significant decrease in the film's transmission in the EUV spectral range and an increase in the visible spectrum have been observed. We suppose that the low thermal stability of Al/Si films restricts their application in the Intergelioprobe project. Thus, there is a lack of filters for the wavelength range of lambda>17 nm. Be/Si and Cr/Si filters have been proposed for the wavelength range near 30.4 nm. Although these filters have lower transparency than Al/Si, they are superior in thermal stability. Multilayer Sc/Al filters with relatively high transmission at a wavelength of 58.4 nm (HeI line) and simultaneously sufficient rejection in the wavelength range near 30.4 nm (HeII line) have been fabricated. They are planned to be used in the project KORTES, whose telescopes will have an EUV channel at 58.4 nm. (C) 2016 Optical Society of America
引用
收藏
页码:4683 / 4690
页数:8
相关论文
共 25 条
  • [1] Multilayer optics for XUV spectral region: technology fabrication and applications
    Andreev, SS
    Akhsakhalyan, AD
    Bibishkin, MA
    Chkhalo, NI
    Gaponov, SV
    Gusev, SA
    Kluenkov, EB
    Prokhorov, KA
    Salashchenko, NN
    Schafers, F
    Zuev, SY
    [J]. CENTRAL EUROPEAN JOURNAL OF PHYSICS, 2003, 1 (01): : 191 - 209
  • [2] On-Orbit Degradation of Solar Instruments
    BenMoussa, A.
    Gissot, S.
    Schuehle, U.
    Del Zanna, G.
    Auchere, F.
    Mekaoui, S.
    Jones, A. R.
    Walton, D.
    Eyles, C. J.
    Thuillier, G.
    Seaton, D.
    Dammasch, I. E.
    Cessateur, G.
    Meftah, M.
    Andretta, V.
    Berghmans, D.
    Bewsher, D.
    Bolsee, D.
    Bradley, L.
    Brown, D. S.
    Chamberlin, P. C.
    Dewitte, S.
    Didkovsky, L. V.
    Dominique, M.
    Eparvier, F. G.
    Foujols, T.
    Gillotay, D.
    Giordanengo, B.
    Halain, J. P.
    Hock, R. A.
    Irbah, A.
    Jeppesen, C.
    Judge, D. L.
    Kretzschmar, M.
    McMullin, D. R.
    Nicula, B.
    Schmutz, W.
    Ucker, G.
    Wieman, S.
    Woodraska, D.
    Woods, T. N.
    [J]. SOLAR PHYSICS, 2013, 288 (01) : 389 - 434
  • [3] Pre-flight calibration of LYRA, the solar VUV radiometer on board PROBA2
    BenMoussa, A.
    Dammasch, I. E.
    Hochedez, J. -F.
    Schuehle, U.
    Koller, S.
    Stockman, Y.
    Scholze, F.
    Richter, M.
    Kroth, U.
    Laubis, C.
    Dominique, M.
    Kretzschmar, M.
    Mekaoui, S.
    Gissot, S.
    Theissen, A.
    Giordanengo, B.
    Bolsee, D.
    Hermans, C.
    Gillotay, D.
    Defise, J. -M.
    Schmutz, W.
    [J]. ASTRONOMY & ASTROPHYSICS, 2009, 508 (02) : 1085 - 1094
  • [4] Multilayer Zr/Si filters for EUV lithography and for radiation source metrology
    Bibishkin, M. S.
    Chkhalo, N. I.
    Gusev, S. A.
    Kluenkov, E. B.
    Lopatin, A. Ya.
    Luchin, V. I.
    Pestov, A. E.
    Salashchenko, N. N.
    Shmaenok, L. A.
    Tsybin, N. N.
    Zuev, S. Yu.
    [J]. MICRO- AND NANOELECTRONICS 2007, 2008, 7025
  • [5] Initial Calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO)
    Boerner, Paul
    Edwards, Christopher
    Lemen, James
    Rausch, Adam
    Schrijver, Carolus
    Shine, Richard
    Shing, Lawrence
    Stern, Robert
    Tarbell, Theodore
    Title, Alan
    Wolfson, C. Jacob
    Soufli, Regina
    Spiller, Eberhard
    Gullikson, Eric
    McKenzie, David
    Windt, David
    Golub, Leon
    Podgorski, William
    Testa, Paola
    Weber, Mark
    [J]. SOLAR PHYSICS, 2012, 275 (1-2) : 41 - 66
  • [6] Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy
    Bogachev, S. A.
    Chkhalo, N. I.
    Kuzin, S. V.
    Pariev, D. E.
    Polkovnikov, V. N.
    Salashchenko, N. N.
    Shestov, S. V.
    Zuev, S. Y.
    [J]. APPLIED OPTICS, 2016, 55 (09) : 2126 - 2135
  • [7] Free-standing spectral purity filters for extreme ultraviolet lithography
    Chkhalo, Nikolay I.
    Drozdov, Mikhail N.
    Kluenkov, Evgeny B.
    Lopatin, Aleksei Ya.
    Luchin, Valerii I.
    Salashchenko, Nikolay N.
    Tsybin, Nikolay N.
    Sjmaenok, Leonid A.
    Banine, Vadim E.
    Yakunin, Andrei M.
    [J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (02):
  • [8] EUV SpectroPhotometer (ESP) in Extreme Ultraviolet Variability Experiment (EVE): Algorithms and Calibrations
    Didkovsky, L.
    Judge, D.
    Wieman, S.
    Woods, T.
    Jones, A.
    [J]. SOLAR PHYSICS, 2012, 275 (1-2) : 179 - 205
  • [9] Investigation of Contamination of Thin-Film Aluminum Filters by MMH-NTO Plumes Exposed to UV Radiation
    Gupta, Vaibhav
    Wieman, Seth
    Didkovsky, Leonid
    Haiges, Ralf
    Yao, Yuhan
    Wu, Wei
    Gruntman, Mike
    Erwin, Dan
    [J]. SOLAR PHYSICS AND SPACE WEATHER INSTRUMENTATION VI, 2015, 9604
  • [10] The Extreme UV Imager of Solar Orbiter - From detailed design to Flight Model
    Halain, J. -P.
    Rochus, P.
    Renotte, E.
    Auchere, F.
    Berghmans, D.
    Harra, L.
    Schuehle, U.
    Schmutz, W.
    Zhukov, A.
    Cuadrado, R. Aznar
    Delmotte, F.
    Dumesnil, C.
    Gyo, M.
    Kennedy, T.
    Mercier, R.
    Verbeeck, C.
    Thome, M.
    Heerlein, K.
    Hermans, A.
    Jacque, L.
    Mazzoli, A.
    Meining, S.
    Rossi, L.
    Tandy, J.
    Smith, P.
    Winter, B.
    [J]. SPACE TELESCOPES AND INSTRUMENTATION 2014: ULTRAVIOLET TO GAMMA RAY, 2014, 9144