Unique chemistries of metal-nitrate precursors to form metal-oxide thin films from solution: materials for electronic and energy applications

被引:86
作者
Cochran, Elizabeth A. [1 ]
Woods, Keenan N. [1 ]
Johnson, Darren W. [1 ]
Page, Catherine J. [1 ]
Boettcher, Shannon W. [1 ]
机构
[1] Univ Oregon, Ctr Sustainable Mat Chem, Mat Sci Inst, Dept Chem & Biochem, Eugene, OR 97403 USA
关键词
LOW-TEMPERATURE FABRICATION; NONUNIFORM COMPOSITION PROFILES; MOLECULAR-ORBITAL CALCULATIONS; ATOMIC LAYER DEPOSITION; SOL-GEL CHEMISTRY; THERMAL-DECOMPOSITION; AQUEOUS-SOLUTION; COMBUSTION SYNTHESIS; CRYSTAL-STRUCTURE; YTTRIUM-OXIDE;
D O I
10.1039/c9ta07727h
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Metal-oxide thin films are used extensively in electronic and energy applications. Solution processing offers a potentially scalable and inexpensive deposition method to expand the applications of metal-oxide films and to complement vacuum-deposition techniques. Among precursors for solution deposition, metal nitrates stand out for their ability to form high-quality metal-oxide thin films. This review focuses on unique aspects of metal-nitrate chemistry that have been exploited to advance the development of solution-processed thin films. We discuss the solid-state bulk, solution, and thin-film chemical reactions involving metal nitrates and illustrate how the resulting metal-oxide thin-film properties depend on the entire reaction pathway. To conclude, we offer perspective as to how understanding the chemistry of film formation from metal-nitrate precursors is useful for addressing the primary drivers for industrial manufacturing of solution-processed metal-oxide thin films.
引用
收藏
页码:24124 / 24149
页数:26
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