Micromachined Fabry-Perot interferometer with embedded nanochannels for nanoscale fluid dynamics

被引:54
作者
van Delft, Koen M. [1 ]
Eijkel, Jan C. T. [1 ]
Mijatovic, Dragana [1 ]
Druzhinina, Tamara S. [1 ]
Rathgen, Helmut [1 ]
Tas, Niels R. [1 ]
van den Berg, Albert [1 ]
Mugele, Frieder [1 ]
机构
[1] Univ Twente, MESA Inst Nanotechnol, BIOS Lab Chip Grp, NL-7500 AE Enschede, Netherlands
关键词
D O I
10.1021/nl062447x
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We describe a microfabricated Fabry-Perot interferometer with nanochannels of various heights between 6 and 20 nm embedded in its cavity. By multiple beam interferometry, the device enables the study of liquid behavior in the nanochannels without using fluorescent substances. During filling studies of ethanol and water, an intriguing filling mode for partially wetting water was observed, tentatively attributed to the entrapment of a large amount of gas inside the channels.
引用
收藏
页码:345 / 350
页数:6
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