A VARIATIONAL BEAM MODEL FOR MEMS DRIVEN BY ELECTROSTATIC AND PIEZOELECTRIC FORCES

被引：0

作者：

Zhou, Ya-rong ^{[1
]}

Yang, Xu ^{[1
]}

Yin, Teng-hao ^{[2
,3
]}

Wang, Bing-lei ^{[1
]}

机构：

[1] Shandong Univ, Sch Civil Engn, Dept Engn Mech, Jinan 250061, Peoples R China

[2] Zhejiang Univ, Dept Engn Mech, Hangzhou 310027, Zhejiang, Peoples R China

[3] Zhejiang Univ, Soft Matter Res Ctr, Hangzhou 310027, Zhejiang, Peoples R China

来源：

PROCEEDINGS OF 2016 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS (SPAWDA) | 2016年

关键词：

Pull-in voltage; Size effect; Modified couple stress theory; MEMS; Piezoelectricity; SIZE-DEPENDENT MODEL;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A size-dependent model of a micro-electromechanical system (MEMS) actuated by both electrostatic and piezoelectric forces is proposed based on the modified couple stress theory. The governing equation and boundary conditions are derived with the help of the Hamilton principle and solved numerically by employing the Galerkin method and Newton downhill method. A material length scale parameter (MLSP) is incorporated in the model to capture the size effect in microstructures. The results show that the piezoelectric voltage on the beam can reduce the electrostatic voltage dramatically and may guide the design of micro-devices.

引用

页码：53 / 56

页数：4

共 12 条

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