Modification of surface mechanical properties of aluminum by high current Mo ion implantation using a MEVVA ion source

被引：3

作者：

Miao, W ^{[1
]}

Liu, XT ^{[1
]}

Tao, K ^{[1
]}

机构：

[1] Tsing Hua Univ, Dept Mat Sci & Engn, Beijing 100084, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 191卷 / 01期

关键词：

intermetallic compound; implantation; mechanical property;

D O I：

10.1016/j.surfcoat.2004.06.015

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The surface modification of At by high Current Mo ion implantation using a metal vapor vacuum arc (MEVVA) ion source has been studied. A high aluminum content intermetallic compound Al12Mo was formed using Mo ion implantation into Al with a current density of 64 muA/cm(2) (the temperature of the sample rises to similar to410 degreesC) to a dose of 3 x 10(17) ionS/cm(2) The hardening aluminide layer with a thickness of about 1600 nm was obtained and the hardness of the Al surface increased with increasing the Mo ion dose up to six times larger than that of the unimplanted one. Also, the elastic modulus of the Al surface was increased by the aluminides. (C) 2004 Elsevier B.V All rights reserved.

引用

页码：33 / 37

页数：5

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