Precision positioning of wafer scanners - Segmented iterative learning control for nonrepetitive disturbances

被引:108
作者
Mishra, Sandipan
Coapilen, Joshua
Tomizuka, Masayoshi
机构
来源
IEEE CONTROL SYSTEMS MAGAZINE | 2007年 / 27卷 / 04期
关键词
D O I
10.1109/MCS.2007.384130
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
[No abstract available]
引用
收藏
页码:20 / 25
页数:6
相关论文
共 8 条
[1]  
Arimoto S., Kawamura S., Miyazaki F., Bettering operation of robots by learning, J. Robot. Syst., 1, 2, pp. 123-140, (1984)
[2]  
Uchiyama M., Formulation of high-speed motion pattern of a mechanical arm by trial, Trans. Soc. Instrum. Contr. Eng., 14, 6, pp. 706-712, (1978)
[3]  
Roover D.D., Bosgra O., Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system, Int. J. Control, 73, 10, pp. 968-979, (2000)
[4]  
Oosten C.V., Bosgra O., Dijkstra B., Reducing residual vibrations through iterative learning control with application to a waferstage, Proc. 2004 American Control Conf., pp. 5150-5155, (2004)
[5]  
Togai M., Yamano O., Analysis design of an optimal learning control scheme for industrial robots: A discrete system approach, Proc. 24th Conf. Decision Control, pp. 1399-1404, (1985)
[6]  
Garimella S., Srinivasan K., Application of iterative learning control to coil-to-coil control in rolling, IEEE Trans. Contr. Syst. Technol., 6, 2, pp. 281-293, (1998)
[7]  
Bristow D., Tharayil M.A., Alleyne A., A survey of iterative learning control—a learning based method for high-performance tracking control, IEEE Control Syst. Mag., 26, 3, pp. 96-114, (2006)
[8]  
Gunnarsson S., Norrlof M., On the design of ILC algorithms using optimization, Automatica, 37, 1, pp. 2011-2016, (2001)