Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding

被引：65
作者：
Svasek, P
Svasek, E
Lendl, B
Vellekoop, M
机构：
[1] Ludwig Boltzmann Inst Biomed Microtechnol, A-1040 Vienna, Austria
[2] Vienna Univ Technol, Inst Chem Technol & Anal, Vienna, Austria
[3] Vienna Univ Technol, Inst Sensor & Actuatorsyst, Vienna, Austria
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 115卷 / 2-3期
关键词：
SU-8; micromixer; fluidic device; FTIR-spectroscopy; wafer bonding;
D O I：
10.1016/j.sna.2004.03.055
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we present a technology for the batch-fabrication of fluidic devices which combines polymer and metal layers. The structures are fabricated by means of two-layer lithography and SU-8-based wafer bonding technique. The combination of SU-8 and metal layers allows the fabrication of "2(1/2)"-dimensional fluidic structures. We realized different types of micromixers for the investigation of chemical reactions by time resolved FTIR-spectroscopy, a flow-through-cell for IR-detection in capillary electrophoresis (CE) and a CE device with integrated capillary. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：591 / 599
页数：9
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