A low temperature scanning tunneling microscopy system for measuring Si at 4.2 K

被引:15
作者
Dreyer, Michael [1 ,2 ]
Lee, Jonghee [1 ,2 ]
Wang, Hui [1 ,2 ]
Barker, Barry [2 ]
机构
[1] Univ Maryland, Dept Phys, College Pk, MD 20740 USA
[2] Lab Phys Sci, College Pk, MD 20740 USA
关键词
elemental semiconductors; scanning tunnelling microscopy; silicon; specimen preparation; HIGH-ENERGY RESOLUTION; SPECTROSCOPY; SURFACE;
D O I
10.1063/1.3427217
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this paper we describe our low temperature scanning tunneling microscopy system with ultrahigh vacuum sample preparation capabilities. The main focus lies on the specialized silicon preparation facility which is the most unusual part. Other special solutions such as sample transport will also be described in detail. Finally, we demonstrate the ability to prepare high quality silicon (111) and (100) surfaces. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3427217]
引用
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页数:6
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