Force Sensors Based on Screen-Printed Cantilevers

被引：32

作者：

Lakhmi, Riadh ^{[1
]}

Debeda, Helene ^{[1
]}

Dufour, Isabelle ^{[1
]}

Lucat, Claude ^{[1
]}

机构：

[1] Univ Bordeaux, IMS Lab, Microsyst Grp, F-33405 Talence, France

来源：

IEEE SENSORS JOURNAL | 2010年 / 10卷 / 06期

关键词：

Cantilevers; ceramic; force sensor; piezoresistor; screen-printing; FABRICATION; SILICON;

D O I：

10.1109/JSEN.2010.2040387

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the design, the fabrication, and the characterization of glass ceramic screen-printed force sensors are described. They are based on the use of cantilevers with integrated piezoresistors. The choice of the materials constituting the cantilever and the strain gauge, so as the dimensions of the cantilever have been optimized in order to measure forces in mN range. The sensors have been fabricated using the screen-printing technique associated with the sacrificial layer technique to release the freestanding part of the cantilevers. Afterwards, they have been characterized: measurement of sensitivity, reproducibility, and materials properties (Young's modulus and strain gauge factor). The performances of these sensors are compared to the existing silicon, polymer, and ceramic sensors.

引用

页码：1133 / 1137

页数：5

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