Graphite-like and polymer-like carbon films formation from Ar/C2H2 at atmospheric pressure by plasma jet

被引：0

作者：

Grigonis, Alfonsas ^{[1
]}

Marcinauskas, Liutauras ^{[1
]}

Valincius, Vitas

机构：

[1] Kaunas Univ Technol, Dept Phys, LT-51368 Kaunas, Lithuania

来源：

PRZEGLAD ELEKTROTECHNICZNY | 2010年 / 86卷 / 07期

关键词：

plasma jet; acetylene; argon; carbon films; C-H FILMS; AMORPHOUS-CARBON; DIAMOND; DEPOSITION; TORCH; ACETYLENE; NANOTUBES; COATINGS; ARC;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A carbon films were deposited on the steel substrates from argon-acetylene gas mixture at atmospheric pressure by plasma jet chemical vapor deposition. The Ar/C2H2 gas volume ratio was 150: 1, while the distance between plasma torch nozzle exit and the samples was 0.005-0.02 m. Scanning electron microscopy analysis revealed that the growth rate and surface roughness of the coatings increases with the distances. The hydrogen and oxygen concentrations (RBS, ERD data) in the films increase with the increase of the deposition distance. Raman spectroscopy indicated that the film prepared at 0.005 m has the highest sp(3) C-C fraction, while the coating deposited at 0.02 m consist from polymeric CHx bonds.

引用

页码：72 / 74

页数：3

共 16 条

[1] A new method for immunosensor preparation:: Atmospheric plasma torch [J].

Akdogan, Ebru ;

Cokeliler, Dilek ;

Marcinauskas, Liutauras ;

Valatkevicius, Pranas ;

Valincius, Vitas ;

Mutlu, Mehmet .

SURFACE & COATINGS TECHNOLOGY, 2006, 201 (06) :2540-2546

[2]

ASMUSSEN J, 2002, DIAMOND THIN FILMS H, P656

[3] Plasma chemistry during the deposition of a-C:H films and its influence on film properties [J].

Benedikt, J ;

Woen, RV ;

van Mensfoort, SLM ;

Perina, V ;

Hong, J ;

van de Sanden, MCM .

[4] Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments [J].

Bhushan, B .

[5] A correlation between the microstructure and optical properties of hydrogenated amorphous carbon films prepared by RF magnetron sputtering [J].

Clin, M ;

Darand-Drouhin, O ;

Zeinert, A ;

Picot, JC .

[6] The role of hydrogen in a-C:H films deposited from hexane or acetylene using direct ion beam deposition method [J].

Grigonis, A ;

Sablinskas, V ;

Silinskas, M ;

Tribandis, D .

VACUUM, 2004, 75 (03) :261-267

[7] Effects of acetylene on property of plasma amorphous carbon films [J].

Louh, SP ;

Wong, CH ;

Hon, MH .

THIN SOLID FILMS, 2006, 498 (1-2) :235-239

[8]

Marcinauskas L, 2007, MATER SCI-MEDZG, V13, P269

[9] Influence of Ar/C2H2 ratio on the structure of hydrogenated carbon films [J].

Marcinauskas, Liutauras ;

Grigonis, Alfonsas ;

Valincius, Vitas .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2009, 355 (22-23) :1240-1245

[10] Effect of hydrogen on the growth of thin hydrogenated amorphous carbon films from thermal energy radicals [J].

Neyts, E ;

Bogaerts, A ;

van de Sanden, MCM .

APPLIED PHYSICS LETTERS, 2006, 88 (14)

← 1 2 →