Growth of Bulk GaN and AlN: Progress and Challenges

被引:48
|
作者
Avrutin, Vitaliy [1 ]
Silversmith, Donald J. [2 ]
Mori, Yusuke [3 ]
Kawamura, F. [3 ]
Kitaoka, Y. [3 ]
Morkoc, Hadis [1 ]
机构
[1] Virginia Commonwealth Univ, Dept Elect & Comp Engn, Richmond, VA 23284 USA
[2] USAF, Off Sci Res, Arlington, VA 22203 USA
[3] Osaka Univ, Grad Sch Elect Engn, Suita, Osaka 5650871, Japan
关键词
Ammonothermal method; GaN; GaN bulk crystals; high-pressure GaN growth; Na flux GaN; NA FLUX METHOD; HIGH-PRESSURE CRYSTALLIZATION; SINGLE-CRYSTAL GROWTH; GALLIUM-NITRIDE; SEEDED GROWTH; AMMONOTHERMAL GROWTH; NITROGEN DISSOLUTION; HVPE; DISLOCATIONS; ADDITIVES;
D O I
10.1109/JPROC.2010.2044967
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
GaN-based optoelectronic and electronic devices such as light-emitting diodes (LEDs), laser, and heterojunction field-effect transistors (HFETs) typically use material grown on foreign substrates such as sapphire, Si, and SiC. However, thermal and lattice mismatch present prevent attainment of quality films deemed necessary by ever increasing demand on device performance. In fact in LEDs intended for solid state lighting, internal quantum efficiencies near 100% might be needed, and further these high efficiencies would have to be retained at very high injection current levels. On the electronic device side, high radio-frequency (RF) power, particularly high-power switching devices, push the material to its limits. Consequently, as has been the case for other successful semiconductor materials systems, native substrates must be developed for the GaN family. In this paper, various approaches such as high-pressure nitrogen solution (HPNS), ammonothermal, and Na flux methods, and an intermediary technique called the hydride vapor phase epitaxy (HVPE; to a lesser extent as there is a review devoted to this technique in this issue) along with their strengths and challenges are discussed.
引用
收藏
页码:1302 / 1315
页数:14
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