Growth of Bulk GaN and AlN: Progress and Challenges

被引:48
|
作者
Avrutin, Vitaliy [1 ]
Silversmith, Donald J. [2 ]
Mori, Yusuke [3 ]
Kawamura, F. [3 ]
Kitaoka, Y. [3 ]
Morkoc, Hadis [1 ]
机构
[1] Virginia Commonwealth Univ, Dept Elect & Comp Engn, Richmond, VA 23284 USA
[2] USAF, Off Sci Res, Arlington, VA 22203 USA
[3] Osaka Univ, Grad Sch Elect Engn, Suita, Osaka 5650871, Japan
关键词
Ammonothermal method; GaN; GaN bulk crystals; high-pressure GaN growth; Na flux GaN; NA FLUX METHOD; HIGH-PRESSURE CRYSTALLIZATION; SINGLE-CRYSTAL GROWTH; GALLIUM-NITRIDE; SEEDED GROWTH; AMMONOTHERMAL GROWTH; NITROGEN DISSOLUTION; HVPE; DISLOCATIONS; ADDITIVES;
D O I
10.1109/JPROC.2010.2044967
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
GaN-based optoelectronic and electronic devices such as light-emitting diodes (LEDs), laser, and heterojunction field-effect transistors (HFETs) typically use material grown on foreign substrates such as sapphire, Si, and SiC. However, thermal and lattice mismatch present prevent attainment of quality films deemed necessary by ever increasing demand on device performance. In fact in LEDs intended for solid state lighting, internal quantum efficiencies near 100% might be needed, and further these high efficiencies would have to be retained at very high injection current levels. On the electronic device side, high radio-frequency (RF) power, particularly high-power switching devices, push the material to its limits. Consequently, as has been the case for other successful semiconductor materials systems, native substrates must be developed for the GaN family. In this paper, various approaches such as high-pressure nitrogen solution (HPNS), ammonothermal, and Na flux methods, and an intermediary technique called the hydride vapor phase epitaxy (HVPE; to a lesser extent as there is a review devoted to this technique in this issue) along with their strengths and challenges are discussed.
引用
收藏
页码:1302 / 1315
页数:14
相关论文
共 50 条
  • [21] Growth of AlN Nanostructure on GaN Using MOCVD
    Loganathan, R.
    Ramesh, R.
    Jayasakthi, M.
    Prabakaran, K.
    Kuppulingam, B.
    Sankaranarayanan, M.
    Balaji, M.
    Arivazhagan, P.
    Singh, Subra
    Baskar, K.
    PROCEEDINGS OF THE 59TH DAE SOLID STATE PHYSICS SYMPOSIUM 2014 (SOLID STATE PHYSICS), 2015, 1665
  • [22] Growth and nonlinear characterization of AlN/GaN structures
    Potì, B.
    Campa, A.
    Larciprete, M. C.
    Sibilia, C.
    Passaseo, A.
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2006, 8 (07): : S524 - S527
  • [23] Improvement of crystal quality in ammonothermal growth of bulk GaN
    Hashimoto, Tadao
    Letts, Edward
    Ikari, Masanori
    Nojima, Yoshihiro
    JOURNAL OF CRYSTAL GROWTH, 2010, 312 (18) : 2503 - 2506
  • [24] Progress and challenges in electrically pumped GaN-based VCSELsle
    Haglund, A.
    Hashemi, E.
    Bengtsson, J.
    Gustavsson, J.
    Carlsson, S.
    Stattin, M.
    Calciati, M.
    Goano, M.
    SEMICONDUCTOR LASERS AND LASER DYNAMICS VII, 2016, 9892
  • [25] Selective area growth of GaN/AlN heterostructures
    Marx, D
    Kawazu, Z
    Nakayama, T
    Mihashi, Y
    Takami, T
    Nunoshita, M
    Ozeki, T
    JOURNAL OF CRYSTAL GROWTH, 1998, 189 : 87 - 91
  • [26] Bulk growth of gallium nitride: challenges and difficulties
    Bockowski, M.
    CRYSTAL RESEARCH AND TECHNOLOGY, 2007, 42 (12) : 1162 - 1175
  • [27] Research Progress in Liquid Phase Growth of GaN Crystals
    Sun, Defu
    Liu, Lei
    Wang, Guodong
    Yu, Jiaoxian
    Li, Qiubo
    Tian, Ge
    Wang, Benfa
    Xu, Xiangang
    Zhang, Lei
    Wang, Shouzhi
    CHEMISTRY-A EUROPEAN JOURNAL, 2024, 30 (17)
  • [28] Growth kinetics and thermal stress in AlN bulk crystal growth
    Wu, B
    Ma, RH
    Zhang, H
    Dudley, M
    Schlesser, R
    Sitar, Z
    JOURNAL OF CRYSTAL GROWTH, 2003, 253 (1-4) : 326 - 339
  • [29] PVT growth of GaN bulk crystals
    Siche, D.
    Gogova, D.
    Lehmann, S.
    Fizia, T.
    Fornari, R.
    Andrasch, M.
    Pipa, A.
    Ehlbeck, J.
    JOURNAL OF CRYSTAL GROWTH, 2011, 318 (01) : 406 - 410
  • [30] Progress and Challenges in GaN-on-Si LEDs
    Fenwick, William
    LIGHT-EMITTING DIODES: MATERIALS, DEVICES, AND APPLICATIONS FOR SOLID STATE LIGHTING XX, 2016, 9768