The use of scanning probe microscope with a diamond tip as a nanotechnological tool

被引:4
作者
Lysenko, O. G. [1 ]
机构
[1] Natl Acad Sci Ukraine, Bakul Inst Superhard Mat, UA-04074 Kiev, Ukraine
关键词
nanotechnology; semiconducting diamond; scanning probe microscopy; ATOMIC-FORCE MICROSCOPE; TUNNELING-MICROSCOPY; LITHOGRAPHY; SURFACE;
D O I
10.3103/S1063457609060069
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Experimental results of the use of a scanning probe microscope having a nanometric resolution in surface machining have been considered. Specific features of the device are a tip of boron-doped diamond single crystal and electromagnetic system of measuring a nanointeraction between the tip and sample surface. Three-dimensional images of gold and silicon surfaces after nanocleaning and nanoscratching have been demonstrated. The possibilities to use diamond nanotools for making elements of nanoelectronics have been discussed.
引用
收藏
页码:387 / 391
页数:5
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