A porous silicon based particle filter for microsystems

被引：11

作者：

Wallner, J. Z. ^{[1
]}

Bergstrom, P. L. ^{[1
]}

机构：

[1] Michigan Technol Univ, Dept Elect & Comp Engn, Houghton, MI 49931 USA

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2007年 / 204卷 / 05期

关键词：

D O I：

10.1002/pssa.200674387

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A porous silicon (PS) based particle filter has been fabricated and tested for integrated microsystems. By engineering the morphology of the porous silicon membrane, depth filtration with high collection efficiency in the submicron range (0.3 similar to 1 mu m), low pressure-drop, and large filtration capacity (0.5 mg/cm(2)) has been demonstrated. With the PS particle filter, on-board gas filtration can be achieved. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：1469 / 1473

页数：5

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