Method to predict effective dielectric constant of porous silica low dielectric constant materials

被引:5
作者
Dong, Xijie [1 ,2 ]
Hu, Yifan [1 ]
Zhao, Jun
Wu, Yuying
机构
[1] Huazhong Univ Sci & Technol, Sch Phys, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Wuhan High Magnet Field Ctr, Wuhan 430074, Peoples R China
关键词
Low dielectric constant; Porous materials; Fractal; LOW-K DIELECTRICS; FRACTAL DIMENSION; FILMS; MEDIA; MICROELECTRONICS; CONDUCTIVITY;
D O I
10.1016/j.physb.2010.05.038
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
A novel method to calculate the effective dielectric constant of isotropic porous silica low dielectric constant materials is developed. The fractal structure of porous materials has been characterized by the fractal theory, and the Maxwell-Wagner interfacial polarization mechanism is employed to characterize the equivalent structure of dielectric constant for predicting the effective dielectric constant of silica porous low dielectric constant materials, effective dielectric constant of zeolite and MSQ. In particular, we used the cubic spline interpolation to obtain the mathematical representation of effective dielectric constant. Predictions of proposed model show reasonable agreement with existing experimental data in a wide range of porosities. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:3551 / 3554
页数:4
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