Nonlinear optical feedback for nano- and micropatterning of silicon surface under femtosecond laser irradiation

被引：10

作者：

Ionin, A. A. ^{[1
]}

Kudryashov, S. I. ^{[1
]}

Rudenko, A. A. ^{[1
]}

Seleznev, L. V. ^{[1
]}

Sinitsyn, D. V. ^{[1
]}

Makarov, S. V. ^{[1
,2
]}

机构：

[1] PN Lebedev Phys Inst RAS, Leninskiy Prospect 53, Moscow 119991, Russia

[2] ITMO Univ, 49 Kronverksky Pr, St Petersburg 197101, Russia

来源：

OPTICAL MATERIALS EXPRESS | 2017年 / 7卷 / 08期

关键词：

CONICAL MICROSTRUCTURES; ABLATION; ARRAYS; MORPHOLOGY; PULSES; WATER;

D O I：

10.1364/OME.7.002793

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Silicon based micro- and nanophotonics yielding plenty of applications from black silicon for photovoltaics to all-dielectric nanoantennas for sensing and nonlinear optics requires advanced methods of fabrication. Here we provide a detailed investigation of femtosecond laser fabrication of silicon based miro- and nanostructures formed via self-organization processes revealing a strong influence of nonlinear optical feedback during their growth under multipulse irradiation. Our results are supported by the experimental study of the effects of laser wavelength, fluence, exposure time, and ambient gas pressure. We demonstrate that both sub-mu m and mu m-scale structures have similar principles of formation, which paves the way to controllable and low-cost fabrication of advanced optoelectronics devices with multilevel patterning of functional elements. (C) 2017 Optical Society of America

引用

页码：2793 / 2807

页数：15

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