Soft X-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts

被引：0

作者：

Stiel, H. ^{[1
,2
]}

Braenzel, J. ^{[1
,2
]}

Dehlinger, A. ^{[1
,2
,3
]}

Jung, R. ^{[1
,2
]}

Luebcke, A. ^{[2
]}

Regehly, M. ^{[4
,5
]}

Ritter, S. ^{[4
]}

Tuemmler, J. ^{[2
]}

Schnuerer, M. ^{[2
]}

Seim, C. ^{[1
,3
,6
]}

机构：

[1] Berlin Lab Innovat Xray Technol, Hardenbergstr 36, D-10623 Berlin, Germany

[2] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, Max Born Str 2A, D-12489 Berlin, Germany

[3] Tech Univ Berlin, IOAP, Hardenbergstr 36, D-10623 Berlin, Germany

[4] Greateyes GmbH, Rudower Chaussee 29, D-12489 Berlin, Germany

[5] Brandenburg Univ Appl Sci, Magdeburger Str 50, D-14770 Brandenburg, Germany

[6] Phys Tech Bundesanstalt, Abbestr 2-12, D-10587 Berlin, Germany

来源：

X-RAY LASERS AND COHERENT X-RAY SOURCES: DEVELOPMENT AND APPLICATIONS | 2017年 / 10243卷

关键词：

Super-resolution; CCD camera; X-ray microscopy; tomography; water window; SPACE-BANDWIDTH PRODUCT; EXTREME-ULTRAVIOLET; MICROSCOPY; RESOLUTION;

D O I：

10.1117/12.2264222

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this contribution, we report about nanoscale imaging using a laser produced plasma source based laboratory transmission X-ray microscope (LTXM) in the water window. The highly brilliant soft X-ray radiation of the LTXM is provided by a laser-produced nitrogen plasma source focused by a multilayer condenser mirror to the sample. An objective zone plate maps the magnified image of the sample on the super resolution camera. This camera employs a deep cooled soft-X-ray CCD imaging sensor sandwiched with a xy piezo stage to allow subpixel displacements of the detector. The camera is read out using a very low noise electronics platform, also directing low mu m shifts of the sensor between subsequent image acquisitions. Finally an algorithm computes a high resolution image from the individual shifted low-resolution image frames.

引用

页数：10

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