Optical and electrical properties of aluminum zinc oxide (AZO) nanostructured thin film deposited on polycarbonate substrate

被引：30

作者：

Eshaghi, Akbar ^{[1
]}

Hajkarimi, Mohammad ^{[1
]}

机构：

[1] Maleke Ashtar Univ Technol, Fac Mat Sci & Engn, Shahinshahr, Esfahan, Iran

来源：

OPTIK | 2014年 / 125卷 / 19期

关键词：

AZO; Thin film; Optical properties; Electrical properties; ZNO-AL FILMS; ROOM-TEMPERATURE; POLYMER; THICKNESS; GROWTH;

D O I：

10.1016/j.ijleo.2014.07.056

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Transparent polymer materials, due to their unique properties, such as light weight, optical transparency, and electrical and mechanical properties, have become very attractive as a replacement for inorganic glass substrates in a wide range of optoelectronic applications. In this research, aluminum zinc oxide nanostructured thin film was deposited on polycarbonate polymer substrates using a magnetron sputtering technique. The structure, morphology, and surface composition of the thin film were investigated by X-ray diffraction and field emission scanning electron microscopy. The optical and electrical properties of the thin film were investigated by UV-VIS-NIR spectrophotometer, ellipsometer, and four point probe method. The X-ray diffraction pattern showed that the aluminum zinc oxide thin film had a polycrystalline structure. The optical and electrical results indicated that the refractive index, band gap, and sheet resistance of the aluminum zinc oxide thin film were 1.8, 3.2 eV, and 265 Omega/sq, respectively. (C) 2014 Elsevier GmbH. All rights reserved.

引用

页码：5746 / 5749

页数：4

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