Electron Beam Etching of CaO Crystals Observed Atom by Atom

被引：24

作者：

Shen, Yuting ^{[1
]}

Xu, Tao ^{[1
,2
,3
]}

Tan, Xiaodong ^{[1
]}

Sun, Jun ^{[1
]}

He, Longbing ^{[1
,2
,3
]}

Yin, Kuibo ^{[1
,2
,3
]}

Zhou, Yilong ^{[1
]}

Banhart, Florian ^{[4
]}

Sun, Litao ^{[1
,2
,3
]}

机构：

[1] Southeast Univ, Collaborat Innovat Ctr Micronano Fabricat Device, SEU FEI Nanopico Ctr, Key Lab MEMS,Minist Educ, Nanjing 210096, Jiangsu, Peoples R China

[2] Southeast Univ, Joint Res Inst, Ctr Adv Mat & Mfg, Suzhou 215123, Peoples R China

[3] Monash Univ, Suzhou 215123, Peoples R China

[4] Univ Strasbourg, CNRS, UMR 7504, Inst Phys & Chim Mat, F-67034 Strasbourg, France

来源：

NANO LETTERS | 2017年 / 17卷 / 08期

基金：

中国国家自然科学基金;

关键词：

Electron beam etching; in situ; TEM; atomic precision; surface roughness; CALCIUM-OXIDE; RADIATION-DAMAGE; FABRICATION; TEM; TRANSESTERIFICATION;

D O I：

10.1021/acs.nanolett.7b02498

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

With the rapid development of nanoscale structuring technology, the precision in the etching reaches the sub-10 nm scale today. However, with the ongoing development of nanofabrication the etching mechanisms with atomic precision still have to be understood in detail and improved. Here we observe, atom by atom, how preferential facets form in CaO crystals that are etched by an electron beam in an in situ high-resolution transmission electron microscope (HRTEM). An etching mechanism under electron beam irradiation is observed that is surprisingly similar to chemical etching and results in the formation of nanofacets. The observations also explain the dynamics of surface roughening. Our findings show how electron beam etching technology can be developed to ultimately realize tailoring of the facets of various crystalline materials with atomic precision.

引用

页码：5119 / 5125

页数：7

共 45 条

[1] CaO supported on mesoporous silicas as basic catalysts for transesterification reactions [J].

Albuquerque, Monica C. G. ;

Jimenez-Urbistondo, Inmaculada ;

Santamaria-Gonzalez, Jose ;

Merida-Robles, Josefa M. ;

Moreno-Tost, Ramon ;

Rodriguez-Castellon, Enrique ;

Jimenez-Lopez, Antonio ;

Azevedo, Diana C. S. ;

Cavalcante, Celio L., Jr. ;

Maireles-Torres, Pedro .

APPLIED CATALYSIS A-GENERAL, 2008, 334 (1-2) :35-43

[2] Irradiation effects in carbon nanostructures [J].

Banhart, F .

REPORTS ON PROGRESS IN PHYSICS, 1999, 62 (08) :1181-1221

[3] Performance of calcium oxide as a heterogeneous catalyst in biodiesel production: A review [J].

Boey, Peng-Lim ;

Maniam, Gaanty Pragas ;

Abd Hamid, Shafida .

CHEMICAL ENGINEERING JOURNAL, 2011, 168 (01) :15-22

[4] DAMAGE OF ZEOLITE-Y IN THE TEM AND ITS EFFECTS ON TEM IMAGES [J].

CSENCSITS, R ;

GRONSKY, R .

ULTRAMICROSCOPY, 1987, 23 (3-4) :421-431

[5] Crystallographic etching of few-layer graphene [J].

Datta, Sujit S. ;

Strachan, Douglas R. ;

Khamis, Samuel M. ;

Johnson, A. T. Charlie .

NANO LETTERS, 2008, 8 (07) :1912-1915

[6] Radiation damage in the TEM and SEM [J].

Egerton, RF ;

Li, P ;

Malac, M .

MICRON, 2004, 35 (06) :399-409

[7] Sub-10 nm device fabrication in a transmission electron microscope [J].

Fischbein, Michael D. ;

Drndic, Marija .

NANO LETTERS, 2007, 7 (05) :1329-1337

[8] Enhanced hydrogen production from biomass with in situ carbon dioxide capture using calcium oxide sorbents [J].

Florin, Nicholas H. ;

Harris, Andrew T. .

CHEMICAL ENGINEERING SCIENCE, 2008, 63 (02) :287-316

[9] In Situ Observation of Electron Beam-Induced Phase Transformation of CaCO3 to CaO via ELNES at Low Electron Beam Energies [J].

Golla-Schindler, Ute ;

Benner, Gerd ;

Orchowski, Alexander ;

Kaiser, Ute .

MICROSCOPY AND MICROANALYSIS, 2014, 20 (03) :715-722

[10] Chemically enhanced focused ion beam micromachining of copper [J].

Gonzalez, JC ;

Griffis, DP ;

Miau, TT ;

Russell, PE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2539-2542

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