LGS and GaPO4 piezoelectric crystals: New results

被引：24

作者：

Le Traon, O. ^{[1
]}

Masson, S. ^{[1
]}

Chartier, C. ^{[1
]}

Janiaud, D. ^{[1
]}

机构：

[1] Off Natl Etud & Rech Aerosp, DMPH, F-92322 Chatillon, France

来源：

SOLID STATE SCIENCES | 2010年 / 12卷 / 03期

关键词：

Gallium orthophosphate; Langasite; LGX; Vibrating inertial sensor; Quality factor; Damping; Thermoelasticity; Viscosity; INTERNAL-FRICTION; TEMPERATURE; RESONATORS; CONSTANTS; SENSORS;

D O I：

10.1016/j.solidstatesciences.2009.06.032

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Theoretical and experimental results of two interesting piezoelectric crystals for vibrating sensors, the La5Ga3SiO14 (also written LGS) and the GaPO4, are presented. First a comparison of different piezoelectric crystals in terms of quality factor and temperature stability is given and shows the theoretical interest of the GaPO4 and the LGS isomorphs (LGX). Then an experimental validation has been undertaken: a dedicated decoupling structure allowing high insulation of two flexural modes is described, as well as its micromachining by ultrasonic machining (USM). The experimental measurements of the LGS resonator gave disappointing results with very low measured quality factors of about 10,000 (under vacuum) for a beam working at 10 kHz. On the other hand, the GaPO4 resonator behaves very well: a quality factor higher than 700,000 (beam frequency 9 kHz) at room temperature and under vacuum has been obtained, as well as a low temperature frequency dependence of 12 ppm/K, in accordance with the theoretical predictions. The impact of the Au excitation/detection electrodes on the quality factor has also been studied in detail and it clearly explains why the measured quality factors are lower than the thermoelastic limit. (C) 2009 Elsevier Masson SAS. All rights reserved.

引用

页码：318 / 324

页数：7

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