A versatile LabVIEW and field-programmable gate array-based scanning probe microscope for in operando electronic device characterization

被引:2
|
作者
Berger, Andrew J. [1 ]
Page, Michael R. [1 ]
Jacob, Jan [2 ]
Young, Justin R. [1 ]
Lewis, Jim [3 ]
Wenzel, Lothar [3 ]
Bhallamudi, Vidya P. [1 ]
Johnston-Halperin, Ezekiel [1 ]
Pelekhov, Denis V. [1 ]
Hammel, P. Chris [1 ]
机构
[1] Ohio State Univ, Dept Phys, Columbus, OH 43210 USA
[2] Werum Software & Syst CIS AG, D-21337 Luneburg, Germany
[3] Natl Instruments, Austin, TX 78759 USA
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2014年 / 85卷 / 12期
基金
美国国家科学基金会;
关键词
FORCE MICROSCOPY; SENSOR; FLOW;
D O I
10.1063/1.4902934
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Understanding the complex properties of electronic and spintronic devices at the micro-and nanoscale is a topic of intense current interest as it becomes increasingly important for scientific progress and technological applications. In operando characterization of such devices by scanning probe techniques is particularly well-suited for the microscopic study of these properties. We have developed a scanning probe microscope (SPM) which is capable of both standard force imaging (atomic, magnetic, electrostatic) and simultaneous electrical transport measurements. We utilize flexible and inexpensive FPGA (field-programmable gate array) hardware and a custom software framework developed in National Instrument's LabVIEW environment to perform the various aspects of microscope operation and device measurement. The FPGA-based approach enables sensitive, real-time cantilever frequency-shift detection. Using this system, we demonstrate electrostatic force microscopy of an electrically biased graphene field-effect transistor device. The combination of SPM and electrical transport also enables imaging of the transport response to a localized perturbation provided by the scanned cantilever tip. Facilitated by the broad presence of LabVIEW in the experimental sciences and the openness of our software solution, our system permits a wide variety of combined scanning and transport measurements by providing standardized interfaces and flexible access to all aspects of a measurement (input and output signals, and processed data). Our system also enables precise control of timing (synchronization of scanning and transport operations) and implementation of sophisticated feedback protocols, and thus should be broadly interesting and useful to practitioners in the field. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:11
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