Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks

被引：34

作者：

Bayn, I. ^{[1
,2
]}

Mouradian, S. ^{[1
,2
]}

Li, L. ^{[1
,2
]}

Goldstein, J. A. ^{[1
,2
]}

Schroeder, T. ^{[1
,2
]}

Zheng, J. ^{[1
,2
]}

Chen, E. H. ^{[1
,2
]}

Gaathon, O. ^{[1
,2
]}

Lu, M. ^{[3
]}

Stein, A. ^{[3
]}

Ruggiero, C. A. ^{[3
]}

Salzman, J. ^{[4
,5
]}

Kalish, R. ^{[6
,7
]}

Englund, Dirk ^{[1
,2
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[2] MIT, Elect Res Lab, Cambridge, MA 02139 USA

[3] Brookhaven Natl Lab, Ctr Funct Nanomat, Upton, NY 11973 USA

[4] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel

[5] Technion Israel Inst Technol, Microelect Res Ctr, IL-32000 Haifa, Israel

[6] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel

[7] Technion Israel Inst Technol, Inst Solid State, IL-32000 Haifa, Israel

来源：

APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 21期

关键词：

SPIN COHERENCE TIME; COLOR-CENTER; CAVITY; CENTERS;

D O I：

10.1063/1.4902562

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 x 10(6)) photonic crystal cavities with low mode volume (V-m = 1.062 x (lambda/n)(3)), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 x 10(3). (C) 2014 AIP Publishing LLC.

引用

页数：5

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