Deposition of CVD diamond onto ion beam modified ASP 23 cutting tools

被引:3
作者
Fenker, M
Ferber, H
Fusser, HJ
Jorgensen, G
Lahres, M
Wolf, GK
机构
[1] Daimler Benz AG, New Mat, D-89013 Ulm, Germany
[2] Daimler Benz AG, Prod Res & Environm, D-89013 Ulm, Germany
[3] Univ Heidelberg, Inst Phys Chem, D-69120 Heidelberg, Germany
关键词
ion implantation; diamond coating; wear; cutting tools;
D O I
10.1016/S0257-8972(97)00230-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The effect of ion implantation in high speed steel ASP 23 on chemical vapour deposition (CVD) diamond nucleation has been studied. N, C and Si have been implanted at 100-150 keV and fluences in the range from 5 x 10(17) to 2 x 10(18) ions cm(-2) Tribological measurements and dry turning tests were carried out to investigate the influence of the ion implantation on the steel. The results are compared with those of untreated high speed steel substrates. The diamond deposition onto the ion beam modified steel substrates was carried out in a microwave plasma CVD apparatus. The substrate temperature was kept below 520 degrees C, because of the fusing temperature of the steel. By means of scanning electron microscopy, Raman spectroscopy, Auger electron spectroscopy and Rockwell indentation tests, the deposition parameters for the CVD process were optimized. It was found, that the Si implantation was advantageous for the consecutive diamond deposition. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:1053 / 1059
页数:7
相关论文
共 16 条
[1]   QUANTITATIVE MEASUREMENT OF RESIDUAL BIAXIAL STRESS BY RAMAN-SPECTROSCOPY IN DIAMOND GROWN ON A TI ALLOY BY CHEMICAL-VAPOR-DEPOSITION [J].
AGER, JW ;
DRORY, MD .
PHYSICAL REVIEW B, 1993, 48 (04) :2601-2607
[2]  
BACHMANN PK, 1991, DIAMOND DIAMOND LIKE, P829
[3]   GROWTH OF DIAMOND FILMS ON STAINLESS-STEEL [J].
CHEN, H ;
NIELSEN, ML ;
GOLD, CJ ;
DILLON, RO ;
DIGREGORIO, J ;
FURTAK, T .
THIN SOLID FILMS, 1992, 212 (1-2) :169-172
[4]   EFFECT OF THE CHEMICAL NATURE OF TRANSITION-METAL SUBSTRATES ON CHEMICAL-VAPOR-DEPOSITION OF DIAMOND [J].
CHEN, X ;
NARAYAN, J .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :4168-4173
[5]  
CHEN X, 1993, P S NAN NAN MAT MAT, P286
[6]   DEPOSITION OF CONTINUOUS AND WELL ADHERING DIAMOND FILMS ON STEEL [J].
FAYER, A ;
GLOZMAN, O ;
HOFFMAN, A .
APPLIED PHYSICS LETTERS, 1995, 67 (16) :2299-2301
[7]   DIAMOND SYNTHESIS ON A METAL-SUBSTRATE [J].
KAWARADA, M ;
KURIHARA, K ;
SASAKI, K .
DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) :1083-1089
[8]  
Lindlbauer A., 1992, DIAMOND FILMS TECHNO, V2, P81
[9]  
Muranaka Y., 1995, Diamond Films and Technology, V5, P1
[10]   INVESTIGATION OF THE CVD DIAMOND INTERMEDIATE LAYER STEEL INTERFACE [J].
NESLADEK, M ;
ASINARI, C ;
SPINNEWYN, J ;
LEBOUT, R ;
LORENT, R ;
DOLIESLAEGER, M .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :912-916