Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

被引：102

作者：

Yashchuk, Valeriy V. ^{[1
]}

Barber, Samuel ^{[1
]}

Domning, Edward E. ^{[1
]}

Kirschman, Jonathan L. ^{[1
]}

Morrison, Gregory Y. ^{[1
]}

Smith, Brian V. ^{[1
]}

Siewert, Frank ^{[2
]}

Zeschke, Thomas ^{[2
]}

Geckeler, Ralf ^{[3
]}

Just, Andreas ^{[3
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

[2] Helmholtz Zentrum Berlin Mat & Energie, Elektronenspeicherring BESSY 2, D-12489 Berlin, Germany

[3] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

X-ray optics; Surface metrology; Surface slope measurement; Long trace profiler; Surface profilometer; Autocollimator; Pentaprism; ANGLE COMPARATOR; CALIBRATION; TOPOGRAPHY; OPTICS; AUTOCOLLIMATORS; ENCODERS;

D O I：

10.1016/j.nima.2009.10.175

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new low-budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are also described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high-performance slope measuring instruments when measuring the same high-quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：212 / 223

页数：12

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