The Possibility of Measuring Electron Density of Plasma at Atmospheric Pressure by a Microwave Cavity Resonance Spectroscopy

被引：6

作者：

Li, Jinming ^{[1
]}

Astafiev, Aleksandr M. ^{[2
,3
]}

Kudryavtsev, Anatoly A. ^{[1
,2
]}

Yuan, Chengxun ^{[1
]}

Zhou, Zhongxiang ^{[1
]}

Wang, Xiaoou ^{[1
]}

机构：

[1] Harbin Inst Technol, Sch Phys, Harbin 150001, Peoples R China

[2] St Petersburg State Univ, Phys Dept, St Petersburg 198504, Russia

[3] St Petersburg Electrotech Univ LETI, Phys Dept, St Petersburg 197376, Russia

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2021年 / 49卷 / 03期

基金：

中国国家自然科学基金;

关键词：

Plasmas; Discharges (electric); Atmospheric measurements; Plasma measurements; Microwave theory and techniques; Microwave measurement; Microwave antennas; Atmospheric pressure gas discharge; collision frequency; complex permittivity; electron density; microwave cavity resonator; quality factor; resonant frequency; transverse electric (TE) mode; POLYETHYLENE TEREPHTHALATE; SURFACE-TREATMENT; DISCHARGES; SCATTERING;

D O I：

10.1109/TPS.2021.3050110

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The electron density of the nonstationary atmospheric pressure discharge in a helium flow is estimated using microwave cavity resonance spectroscopy. For this, a measurement scheme was developed based on a spectrum analyzer and a cylindrical resonator with the first three transverse electric (TE) eigenmodes in the range of 1-1.5 GHz. The main working mode was the TE TE112 mode, which made it possible to place the high-frequency measuring and discharge power supply circuits in the most optimal geometry. By measuring the eigenfrequency shift of this mode and its Q factor, gas-discharge plasma parameters were calculated using the well-known perturbation theory. The results are in good agreement with the known data from the literature. This method was additionally tested on a glass rod and a thin low-pressure gas discharge tube.

引用

页码：1001 / 1008

页数：8

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