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Advantages of a Pulsed Electrical Excitation Mode on the Corrosion Performance of Organosilicon Thin Films Deposited on Aluminium Foil by Atmospheric Pressure Dielectric Barrier Discharge
被引:41
作者:
Boscher, Nicolas D.
[1
]
Choquet, Patrick
[1
]
Duday, David
[1
]
Verdier, Stephane
[2
]
机构:
[1] Ctr Rech Publ Gabriel Lippmann, Dept Sci & Anal Mat, L-4422 Belvaux, Luxembourg
[2] Ctr Rech Publ Gabriel Lippmann, Foil Innovat Ctr, L-4422 Belvaux, Luxembourg
关键词:
corrosion;
dielectric barrier discharges (DBD);
hexamethyldisiloxane (HMDSO);
pulsed discharges;
thin films;
CHEMICAL-VAPOR-DEPOSITION;
PLASMA DEPOSITION;
MICROWAVE PLASMA;
COATINGS;
XPS;
PECVD;
D O I:
10.1002/ppap.200900094
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
Atmospheric pressure dielectric barrier discharge deposition of organosilicon thin films on aluminium foils was investigated for different electrical excitations. The plasma reactor was fed with nitrogen and hexamethyldisiloxane as film precursor. Scanning electron microscopy observations and secondary ion mass spectrometry associated with X-ray photoelectron spectroscopy showed how the modulation of the electrical excitation can affect the morphology and the chemistry of the coatings. The corrosion behaviour of the films obtained was characterised by means of electrochemical techniques. Relationships between the electrical excitation and the electrochemical properties of the films are reported and these results have been correlated with the morphology and chemistry modifications of the films.
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页码:163 / 171
页数:9
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