Force calibration in lateral force microscopy: a review of the experimental methods

被引:66
作者
Munz, Martin [1 ]
机构
[1] Natl Phys Lab, Analyt Sci Div, Teddington TW11 0LW, Middx, England
关键词
TORSIONAL SPRING CONSTANT; SCANNING PROBE MICROSCOPY; QUANTITATIVE CHARACTERIZATION; ATOMIC-SCALE; STICK-SLIP; FRICTION; CANTILEVERS; AFM; TIP; POLYMER;
D O I
10.1088/0022-3727/43/6/063001
中图分类号
O59 [应用物理学];
学科分类号
摘要
Lateral force microscopy (LFM) is a variation of atomic/scanning force microscopy (AFM/SFM). It relies on the torsional deformation of the AFM cantilever that results from the lateral forces acting between tip and sample surface. LFM allows imaging of heterogeneities in materials, thin films or monolayers at high spatial resolution. Furthermore, LFM is increasingly used to study the frictional properties of nanostructures and nanoparticulates. An impediment for the quantification of lateral forces in AFM, however, is the lack of reliable and established calibration methods. A widespread acceptance of LFM requires quantification coupled with a solid understanding of the sources of uncertainty. This paper reviews the available experimental calibration methods and identifies particularly promising approaches.
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页数:34
相关论文
共 118 条
[1]   AFM: a versatile tool in biophysics [J].
Alessandrini, A ;
Facci, P .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2005, 16 (06) :R65-R92
[2]   Development of a microlateral force sensor and its evaluation using lateral force microscopy [J].
Ando, Yasuhisa ;
Shiraishi, Naoki .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (03)
[3]   Corrected direct force balance method for atomic force microscopy lateral force calibration [J].
Asay, David B. ;
Hsiao, Erik ;
Kim, Seong H. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (06)
[4]   Direct force balance method for atomic force microscopy lateral force calibration [J].
Asay, DB ;
Kim, SH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (04)
[5]  
BERGMANNSCHAEFE, 1974, LEHRBUCH EXPERIMENTA, V1, pCH5
[6]   Microfabricated torsion levers optimized for low force and high-frequency operation in fluids [J].
Beyder, Arthur ;
Sachs, Frederick .
ULTRAMICROSCOPY, 2006, 106 (8-9) :838-846
[7]   AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS [J].
Bhushan, B ;
Kasai, T ;
Kulik, G ;
Barbieri, L ;
Hoffmann, P .
ULTRAMICROSCOPY, 2005, 105 (1-4) :176-188
[8]  
BHUSHAN B, 1994, ASME, V116, P389
[9]  
BHUSHAN B, 1999, MICRONANOTRIBOLOGY M, pCH14
[10]  
BHUSHAN B, 1999, HDB MICRONANOTRIBOLO, pCH1