Metal-catalyzed crystallization of amorphous carbon to graphene

被引:236
作者
Zheng, Maxwell [1 ,2 ,3 ]
Takei, Kuniharu [1 ,2 ,3 ]
Hsia, Benjamin [4 ]
Fang, Hui [1 ,2 ,3 ]
Zhang, Xiaobo [1 ,2 ,3 ]
Ferralis, Nicola [4 ]
Ko, Hyunhyub [1 ,2 ,3 ]
Chueh, Yu-Lun [1 ,2 ,3 ]
Zhang, Yuegang
Maboudian, Roya [3 ,4 ]
Javey, Ali [1 ,2 ,3 ]
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[4] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
amorphous state; annealing; catalysis; crystallisation; graphene; precipitation; Raman spectra; thin films; FEW-LAYER GRAPHENE; LARGE-AREA; DEVICES; FILMS;
D O I
10.1063/1.3318263
中图分类号
O59 [应用物理学];
学科分类号
摘要
Metal-catalyzed crystallization of amorphous carbon to graphene by thermal annealing is demonstrated. In this "limited source" process scheme, the thickness of the precipitated graphene is directly controlled by the thickness of the initial amorphous carbon layer. This is in contrast to chemical vapor deposition processes, where the carbon source is virtually unlimited and controlling the number of graphene layers depends on the tight control over a number of deposition parameters. Based on the Raman analysis, the quality of graphene is comparable to other synthesis methods found in the literature, such as chemical vapor deposition. The ability to synthesize graphene sheets with tunable thickness over large areas presents an important progress toward their eventual integration for various technological applications.
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页数:3
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