Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

被引：169

作者：

Salvia, James C. ^{[1
]}

Melamud, Renata ^{[2
]}

Chandorkar, Saurabh A. ^{[1
]}

Lord, Scott F. ^{[3
]}

Kenny, Thomas W. ^{[4
]}

机构：

[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA

[2] SiTime Corp, Sunnyvale, CA 94085 USA

[3] USN, Nucl Power Sch, Goose Creek, SC 29445 USA

[4] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2010年 / 19卷 / 01期

基金：

美国国家科学基金会;

关键词：

Frequency stability; microresonators; oscillators; phase-locked loops (PLLs); RESONATOR;

D O I：

10.1109/JMEMS.2009.2035932

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a new temperature compensation system for microresonator-based frequency references. It consists of a phase-locked loop (PLL) whose inputs are derived from two microresonators with different temperature coefficients of frequency. The resonators are suspended within an encapsulated cavity and are heated to a constant temperature by the PLL controller, thereby achieving active temperature compensation. We show repeated real-time measurements of three 1.2-MHz prototypes that achieve a frequency stability of +/- 1 ppm from -20 degrees C to + 80 degrees C, as well as a technique to reduce steady-state frequency errors to +/- 0.05 ppm using multipoint calibration. [2009-0074]

引用

页码：192 / 201

页数：10

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