A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors

被引：0

作者：

Chang, Wenhan ^{[1
]}

Li, Zhe ^{[1
]}

Cheng, Shengzhan ^{[1
]}

Sun, Shoule ^{[1
]}

Gao, Chengchen ^{[1
]}

Hao, Yilong ^{[1
,2
]}

机构：

[1] Peking Univ, Inst Microelect, Natl Key Lab Nano Micro Fabricat Technol, Beijing, Peoples R China

[2] Innovat Ctr Micro Nano Elect & Integrated Syst, Beijing, Peoples R China

来源：

17TH IEEE INTERNATIONAL CONFERENCE ON IC DESIGN AND TECHNOLOGY (ICICDT 2019) | 2019年

基金：

中国国家自然科学基金;

关键词：

APVS; sensitivity; gas medium;

D O I：

10.1109/icicdt.2019.8790911

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Micro-fabricated thermal acoustic vector sensor can directly measure the vibration velocity of sound particles. However, due to the limitation of thermal capacity of thermistor and heat transfer rate, the sensitivity of the sensor is very low at high frequencies. This paper presents a method of improving the sensitivity of thermal acoustic sensors for the first time by changing its working medium. Both simulation and experiment have been carried out to verify this method. The simulation results showed that the sensitivity of the sensor in sulfur hexafluoride under a standard atmospheric pressure was 14dB higher than that in air. The experimental results showed good agreement with simulation results. Besides, the noise of APVS was almost at the same level in different gas mediums. Therefore, the signal to noise ratio has been improved.

引用

页数：4

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