Role of annealing in constant period of voltage stress on the burn-in effect suppression of InGaP/GaAs heterojunction bipolar transistors

被引:1
作者
Chong, Kwok-Keung
Jenq, Fenq-Lin
Houng, Mau-Phon
机构
[1] Natl Kaohsiung Marine Univ, Dept Microelect Engn, Kaohsiung 811, Taiwan
[2] Far E Univ, Dept Elect Engn, Hsin Shih 744, Taiwan
[3] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 701, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 3A期
关键词
annealing; burn-in; complexes; constant period of voltage stress; current gain;
D O I
10.1143/JJAP.46.974
中图分类号
O59 [应用物理学];
学科分类号
摘要
Rapid thermal annealing (RTA) is proved to be more efficient in dissociating hydrogen complexes than using a constant period of voltage stress (CPVS). Without waiting for the bond breaking of complexes by minority carrier injection, RTA favors the critical base-emitter voltage (V-BE) responsible for the occurrence of burn-in (BI) from 1.75 to 1.4 V and thus assists CPVS in reducing V-BE by about 25% used in BI suppression. Besides eliminating the BI, the sample first prepared by RTA and followed by CPVS has larger base and collector current densities at V-BE > 1. 1 V and reaches 6 times those at V-BE > 1. 3 V compared with the sample only using by CPVS.
引用
收藏
页码:974 / 976
页数:3
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