Single-crystal diamond tools formed using a focused ion beam: Tool life enhancement via heat treatment

被引：15

作者：

Kawasegi, Noritaka ^{[1
]}

Ozaki, Kazuma ^{[2
]}

Morita, Noboru ^{[3
]}

Nishimura, Kazuhito ^{[4
]}

Sasaoka, Hideki ^{[5
]}

机构：

[1] Toyama Ind Technol Ctr, Cent Res Inst, Takaoka, Toyama 9330981, Japan

[2] Toyama Univ, Grad Sch Sci & Engn Educ, Toyama 9308555, Japan

[3] Chiba Univ, Grad Sch Engn, Inage Ku, Chiba 2638522, Japan

[4] Kogakuin Univ, Fac Engn, Hachioji, Tokyo 1920015, Japan

[5] Yamaguchi Univ, Fac Engn, Ube, Yamaguchi 7558611, Japan

来源：

基金：

日本学术振兴会;

关键词：

Diamond; Ultra-precision machining; Single-crystal diamond tool; Focused ion beam; Heat treatment; Etching; Amorphous; Tool life; IMPLANTATION; SILICON;

D O I：

10.1016/j.diamond.2014.07.013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe a technique to improve diamond cutting tools used in nanometer- and micrometer-scale machining and formed via focused-ion-beam (FIB) micromachining. Although FIB irradiation is an effective means of fabricating arbitrary miniature shapes in diamond cutting tools, FIB irradiation induces a non-diamond phase, as well as Ga ion implantation, in the irradiated area. This adversely affects the performance of the ultra-precision machining process, especially in terms of tool life and the quality of the machined surface. To eliminate the affected layer, we applied heat-treatment techniques and investigated the optimum thermal profiles. A temperature of 500 degrees C applied to the cutting tool provided optimal machining of nickel phosphorus. The tool life was significantly improved, and a tool life similar to that of a non-irradiated diamond tool was obtained. The quality of the machined surface was also improved markedly owing to superior tool wear and adhesion resistance. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：14 / 18

页数：5

共 18 条

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