Poole-Frenkel Effect and the Opportunity of Its Application for the Prediction of Radiation Charge Accumulation in Thermal Silicon Dioxide

被引:1
|
作者
Shiryaev, A. A. [1 ]
Vorotyntsev, V. M. [2 ]
Shobolov, E. L. [1 ]
机构
[1] Sedakov Measuring Syst Res Inst, Res & Dev Ctr, Nizhnii Novgorod 603137, Russia
[2] Alekseev Nizhny Novgorod State Tech Univ, Nizhnii Novgorod 603950, Russia
关键词
ON-INSULATOR STRUCTURES; BURIED OXIDES; IRRADIATED SIMOX; ELECTRON; SIO2; CONDUCTION; MECHANISM; STATES; FILMS; LAYER;
D O I
10.1134/S1063782618090166
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
It is proposed that the Poole-Frenkel effect be applied to predict radiation-induced charge accumulation in thermal silicon dioxide. Various conduction mechanisms of thermal silicon dioxide are considered, the conditions of the appearance of the Poole-Frenkel effect in it are determined, and the characteristics of donor centers participating in Poole-Frenkel electrical conductivity are calculated. A donor center level at an energy of 2.34 eV below the conduction-band bottom is determined and the concentration of ionized donor centers of 1.0 x 10(9) cm(-3) at 400 K and a field strength of 10 MV/cm is found. It is concluded that the Poole-Frenkel effect can be applied not for prediction of the absolute value of the radiation-induced charge but for comparison of the samples in terms of the ability to accumulate it.
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页码:1114 / 1117
页数:4
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