As-grown Mn3CuN thin films with high crystallinity prepared by dynamic aurora pulsed laser deposition

被引:2
作者
Kawaguchi, Takahiko [1 ]
Suzuki, Jumpei [1 ]
Sakamoto, Naonori [1 ,2 ]
Suzuki, Hisao [1 ,2 ,3 ]
Wakiya, Naoki [1 ,2 ,3 ]
机构
[1] Shizuoka Univ, Dept Elect & Mat Sci, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan
[2] Shizuoka Univ, Res Inst Elect, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan
[3] Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan
关键词
Antiperovskite; Nitride; Epitaxial thin film; PLD; Nitrogen plasma; SPINODAL DECOMPOSITION;
D O I
10.2109/jcersj2.20216
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Mn3CuN thin films were prepared using dynamic aurora pulsed laser deposition (PLD), which enables magnetic field application during film growth. The magnetic field can stabilize a plasma state of nitrogen in plume generated from a nitride target. Results show that Mn3CuN phase with high crystallinity is observed clearly and grown epitaxially on MgO(001) in the as-grown thin films. The as-grown thin films show ferromagnetic transition near 150K without post-annealing, indicating almost no nitrogen deficiency. These results suggest that dynamic aurora PLD is effective for nitride thin films with high crystallinity. (C) 2021 The Ceramic Society of Japan. All rights reserved.
引用
收藏
页码:377 / 382
页数:6
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