Chaotic Dynamics of MEMS Resonators Under Multi-coupled Fields

Purpose In the micro-resonant sensor, many physical fields, including mechanical force, electric field force, air damping force, and molecular force, exist simultaneously and interact with each other, which leads to the complex dynamic characteristics of the sensor, which will seriously affect its measurement sensitivity, cause large signal detection errors, or lead to high-end equipment detection misjudgment and ultimately major accidents and should be investigated. Methods Multi-field-coupled nonlinear dynamic equations of a micro-resonant pressure sensor are established, with the effects of the mechanical field, molecular field, and air damping field considered. The chaotic dynamical performance and chaotic control of the sensor are evaluated. A micro-resonant pressure sensor is fabricated, and a low-frequency closed-loop system is developed. The vibration performance of the sensor under different excitation voltages is evaluated. Results Results indicate that the initial clearance, resonator size, air damping coefficient, and excitation voltage considerably affect the chaotic vibration characteristics of the resonant sensor. By selecting the appropriate control signal values, the chaotic state of the sensor can be effectively controlled using the direct variable feedback method. Conclusion With the continued development of sensor miniaturization, the influences of the neglected molecular force, air damping force, and other forces on the performance of the sensor will become obvious and imperative to consider. These results can be used to determine the measurements of the resonators to prevent chaotic vibrations and ensure sensor performance.