Tunable MEMS volume capacitors for high voltage applications

被引：5
作者：
Etxeberria, J. A. [1 ]
Gracia, F. J. [1 ]
机构：
[1] Univ Navarra, CEIT & TECNUN, San Sebastian 20018, Spain
来源：
MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期
关键词：
power MEMS; tunable capacitor; bulk micromachining; high Q;
D O I：
10.1016/j.mee.2007.01.063
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports the design, fabrication and electrical characterization of MEMS tunable volume capacitors to be used as voltage controlled devices in tuning telecommunication circuits. A novel fabrication process to obtain parallel plate metallic capacitors based on deep reactive ion etching (DRIE) bulk micromachining techniques have been developed. Devices of three different electrode areas have been fabricated and designed and the influence of the area in the main characteristics of the MEMS capacitors established. The interaction of the DC tuning voltage and AC signal and their influence on the tuning behavior has been analyzed and the top operation limits evaluated. The obtained results make this kind of MEMS tunable metallic capacitors appropriate candidates for its use in the new power MEMS scenario. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1393 / 1397
页数：5
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