High-Performance WSe2 Photodetector Based on a Laser-Induced p-n Junction

被引:73
作者
Chen, Jing [1 ]
Wang, Qiyuan [1 ]
Sheng, Yaochen [2 ]
Cao, Gaoqi [1 ]
Yang, Peng [1 ]
Shan, Yabing [1 ]
Liao, Fuyou [2 ]
Muhammad, Zaheer [1 ]
Bao, Wenzhong [2 ]
Hu, Laigui [1 ]
Liu, Ran [1 ]
Cong, Chunxiao [1 ]
Qiu, Zhi-Jun [1 ]
机构
[1] Fudan Univ, Sch Informat Sci & Technol, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[2] Fudan Univ, Sch Microelect, Shanghai 200433, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
tungsten diselenide; photodetector; laser doping; p-n junction; oxidation product; MOS2; OXIDATION; GRAPHENE; DIODES;
D O I
10.1021/acsami.9b13948
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Two-dimensional heterojunctions exhibit many unique features in nanoelectronic and optoelectronic devices. However, heterojunction engineering requires a complicated alignment process and some defects are inevitably introduced during material preparation. In this work, a laser scanning technique is used to construct a lateral WSe2 p-n junction. The laser-scanned region shows p-type behavior, and the adjacent region is electrically n-doped with a proper gate voltage. The laser-oxidized product WOx is found to be responsible for this p-type doping. After laser scanning, WSe2 displays a change from ambipolar to unipolar p-type property. A significant photo current emerges at the p-n junction. Therefore, a self-powered WSe2 photodetector can be fabricated based on this junction, which presents a large photoswitching ratio of 10(6), a high photoresponsivity of 800 mA W-1, and a short photoresponse time with long-term stability and reproducibility. Therefore, this selective laser-doping method is prospective in future electronic applications.
引用
收藏
页码:43330 / 43336
页数:7
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