Non-contact local conductivity measurement of metallic nanowires based on semi-near-field reflection of microwave atomic force microscopy

被引：1

作者：

Tong, Bo ^{[1
]}

Hirabayashi, Takahiro ^{[1
]}

Toku, Yuhki ^{[1
]}

Morita, Yasuyuki ^{[2
]}

Ju, Yang ^{[1
]}

机构：

[1] Nagoya Univ, Dept Mech Sci & Engn, Nagoya, Aichi 4648603, Japan

[2] Kumamoto Univ, Fac Adv Sci & Technol, Kumamoto 8608555, Japan

来源：

APPLIED PHYSICS EXPRESS | 2021年 / 14卷 / 06期

基金：

日本学术振兴会;

关键词：

atomic force microscopy; microwave; metallic nanowire; conductivity measurement; ARRAYS; GOLD;

D O I：

10.35848/1882-0786/abf444

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this study, a non-contact and quantitative evaluation method was developed to measure the conductivity of metallic nanowires at nanometer-scale resolution. Using a coaxial probe, microwave images and topographical images were simultaneously obtained for three nanowires via microwave atomic force microscopy (M-AFM). A semi-near-field model was established to describe the distribution of the electric field between the probe and the sample. Based on this model, the local conductivities of metallic nanowires on the nanometer scale were quantitatively evaluated in a single scan, using a metal strip substrate to calibrate the reflected signal.

引用

页数：6

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