RETRACTED: A Miniaturized Five-Axis Isotropic Tactile Sensor for Robotic Manipulation (Retracted Article)

被引:9
作者
Chu, Zhongyi [1 ]
Su, Lin [1 ]
Chen, Gen [1 ]
Cui, Jing [2 ]
Sun, Fuchun [3 ]
机构
[1] Beihang Univ, Sch Instrument Sci & Optoelect Engn, Beijing 100191, Peoples R China
[2] Beijing Univ Technol, Sch Mech Engn & Appl Elect, Beijing 101100, Peoples R China
[3] Tsinghua Univ, Dept Comp Sci & Technol, Beijing 101101, Peoples R China
基金
中国国家自然科学基金;
关键词
Multi-axis; measurement isotropy; double-layer capacitors; tactile sensors; robotic manipulation; 6-AXIS FORCE/TORQUE SENSOR; FORCE SENSOR; OPTIMIZATION; DESIGN;
D O I
10.1109/JSEN.2019.2929871
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Miniaturized multi-axis (force & torque) tactile sensors are paramount for the robot system to interact safely with the external environment, especially for the controlled adhesive robots. However, there exists a drawback-measurement anisotropy, which prevents sensors from performing equally well in all the directions and the high degree of integration. Based on the plate capacitive mechanism, this paper introduces a miniaturized 5-axis tactile sensing method with a novel double-layer sensitive structure. Practically, shear force is detected by measuring the change of overlap area in the upper-layer-sensing cell, while the normal force and moment can be obtained by the variable space between two plates arranged in a 2 x 2-grid in the lower-layer-sensing cell. Moreover, in order to achieve the measurement isotropy, the relationship between the force/torque and the capacitance is clarified to facilitate the independent adjustment of the sensitivity of each axis. Based on the methodology, a miniature 5-axis flat tactile sensor is manufactured. The experimental results show that the shear sensitivity of the prepared sensor is over 0.2557pF/N within 7 N, reaching the same magnitude as normal force (0.2859pF/N over 3N range). The sensitivities of torque are over 1.8406 (N.m)(-1) with a full-scale range of 0.04 N.m. The results demonstrate that the miniaturized tactile sensor is capable of isotropic measurement among 5-axis for robotic manipulation.
引用
收藏
页码:10243 / 10252
页数:10
相关论文
共 31 条
[1]  
Alveringh D, 2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), P680, DOI 10.1109/MEMSYS.2014.6765732
[2]  
[Anonymous], 2016, THESIS
[3]  
Brookhuis R. A., 2013, 2013 Transducers & Eurosensors XXVII: 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), P2737, DOI 10.1109/Transducers.2013.6627372
[4]   3D force sensor for biomechanical applications [J].
Brookhuis, R. A. ;
Lammerink, T. S. J. ;
Wiegerink, R. J. ;
de Boer, M. J. ;
Elwenspoek, M. C. .
SENSORS AND ACTUATORS A-PHYSICAL, 2012, 182 :28-33
[5]  
Brookhuis R. A., 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), P595, DOI 10.1109/MEMSYS.2012.6170258
[6]  
Brookhuis RA, 2016, PROC IEEE MICR ELECT, P885, DOI 10.1109/MEMSYS.2016.7421772
[7]  
Chandra M, 2017, 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), P504
[8]   Doubling the spatial resolution in capacitive tactile sensors [J].
Chandra, Mochtar ;
Ke, Shi-Yu ;
Chen, Rongshun ;
Lo, Cheng-Yao .
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (03)
[9]   A Gecko-Inspired Electroadhesive Wall-Climbing Robot [J].
Chen, Rui .
IEEE Potentials, 2015, 34 (02) :15-19
[10]   Impedance Identification Using Tactile Sensing and Its Adaptation for an Underactuated Gripper Manipulation [J].
Chu, Zhong-Yi ;
Yan, Shao-Bo ;
Hu, Jian ;
Lu, Shan .
INTERNATIONAL JOURNAL OF CONTROL AUTOMATION AND SYSTEMS, 2018, 16 (02) :875-886