LQG-based Synchronization Control of Fabry-Perot Spectrometer using Multiple Piezoelectric Actuators (PEAs)

被引：0
作者：
Li, Zhi [1 ]
Shan, Jinjun [1 ]
机构：
[1] York Univ, Dept Earth & Space Sci & Engn, 4700 Keele St, Toronto, ON M3J 1P3, Canada
来源：
2016 IEEE INTERNATIONAL CONFERENCE ON INFORMATION AND AUTOMATION (ICIA) | 2016年
关键词：
Fabry-Perot spectrometer; piezoelectric actuators; LQG controller; synchronization control; TRACKING CONTROL; SYSTEMS;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
In this paper, three piezoelectric actuators (PEAs) in parallel installation are utilized in the Fabry-Perot spectrometer for adjusting the optical lens at the nanometer level. Due to the mechanical coupling and uneven preloads to the actuators, the responses of each PEA is rather different, which causes unparallel movement of the positioning stage in the Fabry-Perot spectrometer leading to poor measurement results. Therefore, the controller is highly demanded to enable the synchronized motion of the three PEAs. To this end, the linear-quadratic-Gaussian (LQG) controller combining a synchronization control strategy is developed. The effectiveness of the proposed controller is validated via the experimental tests.
引用
收藏
页码：448 / 453
页数：6
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