Laser-optical non-contact measurement of pendular displacement of elastic device

被引：0

作者：

Zou, LM ^{[1
]}

Yang, WG ^{[1
]}

Jin, GL ^{[1
]}

Tan, JB ^{[1
]}

机构：

[1] HIT, Harbin Inst Technol, Inst Ultra Precis Opt & Elect Instrument Engn, Dept Automat Measurement & Control, Harbin 150001, Peoples R China

来源：

PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2 | 2004年

关键词：

laser-optical triangulation method; pendular displacement; non-contact measurement;

D O I：

暂无

中图分类号：

TP31 [计算机软件];

学科分类号：

081202 ; 0835 ;

摘要：

The measurement of the pendular displacement of an elastic device based. on the principle of laser-optical triangulation method is presented with the theory behind, experiment required and optimum design of system, and discussion of results detailed. The measurement sytem eliminates the influence of environmental vibration on precision measurement by taking the advantage of corresponding software technique to carry out the measurement in the case of elastic device having tiny vibration. This system realized the automatic measurement of the rigidity of elastic device. The pendular displacement resolution is up to 0.3mum and the uncertainty of measurement is +/-0.5mum. This measurement system features non-contact, fast response, easy operation, and so on. This system provides an efficient way to monitor the quality of elastic devices in mass production.

引用

页码：772 / 777

页数：6