Deposition of polysiloxane-like nanofilms onto an aluminium alloy by plasma polymerized hexamethyldisiloxane: characterization by XPS and contact angle measurements

被引:30
作者
Azioune, A. [1 ]
Marcozzi, M. [1 ]
Revello, V. [1 ]
Pireaux, J. J. [1 ]
机构
[1] Univ Namur FuNDP, Lise Lab, B-5000 Namur, Belgium
关键词
aluminium alloy; plasma cleaning; plasma polymerization; HMDSO; XPS; surface energy;
D O I
10.1002/sia.2563
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this work, aluminium (Alclad 2024-T3) substrates were cleaned by an r.f. (13.56 MHz) plasma, using argon (Ar), oxygen (O-2) and a mixture of O-2/Ar (50: 50) gases. The effectiveness of plasma cleaning was checked in situ using X-ray photoelectron spectroscopy (XPS) and ex situ using water contact angle measurements. XPS O/Al surface atomic ratios are in excellent agreement with those of the crystalline boehmite and the pseudoboehmite. Oxygen O 1s peak-fitting was used to quantify the proportion of hydroxyl ions and the functional composition on the aluminium surface: the surface cleaned with O-2 plasma contains 50% of aluminium hydroxides, the ones cleaned with Ar plasma and with Ar/O-2 plasma contain, respectively, 25 and 37% hydroxyl ions. The binding energy separation between Al 2p and O 1s is characteristic of AlO(OH). Thin SiOx films were subsequently deposited from a mixture of hexamethyldisiloxane (HMDSO) and oxygen. In the absence of oxygen, a hydrophobic (Theta >= 100 degrees) film characteristic of polydimethylsiloxane (PDMS) is formed: polysiloxane-like thinner films (SiOx) are obtained with the introduction of oxygen. XPS and contact angle measurements confirmed both the composition and the structure of these films. More importantly, contact angle measurements using different liquids and interpreted with the van Oss-Good-Chaudhury theory allowed determination of the surface free energy of the deposited films: the calculated values of surface tension of the film formed from HMDSO/O-2: (50/50) are in excellent agreement with those of reference silica-based materials such as a silicon wafer and cleaned glass. Copyright (c) 2007 John Wiley & Sons, Ltd.
引用
收藏
页码:615 / 623
页数:9
相关论文
共 55 条
  • [1] A study of HMDSO/O2 plasma deposits using a high-sensitivity and -energy resolution XPS instrument:: curve fitting of the Si 2p core level
    Alexander, MR
    Short, RD
    Jones, FR
    Michaeli, W
    Blomfield, CJ
    [J]. APPLIED SURFACE SCIENCE, 1999, 137 (1-4) : 179 - 183
  • [2] Alexander MR, 2000, SURF INTERFACE ANAL, V29, P468, DOI 10.1002/1096-9918(200007)29:7<468::AID-SIA890>3.0.CO
  • [3] 2-V
  • [4] An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxygen plasmas
    Alexander, MR
    Short, RD
    Jones, FR
    Stollenwerk, M
    Zabold, J
    Michaeli, W
    [J]. JOURNAL OF MATERIALS SCIENCE, 1996, 31 (07) : 1879 - 1885
  • [5] Electrochemical impedance spectroscopy evaluation of the corrosion behaviour of Mg alloy coated with PECVD organosilicon thin film
    Angelini, E
    Grassini, S
    Rosalbino, F
    Fracassi, F
    d'Agostino, R
    [J]. PROGRESS IN ORGANIC COATINGS, 2003, 46 (02) : 107 - 111
  • [6] XPS study of siloxane plasma polymer films
    Balkova, R
    Zemek, J
    Cech, V
    Vanek, J
    Prikryl, R
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 1159 - 1163
  • [7] Beamson G., 1992, HIGH RESOLUTION XPS, P72
  • [8] REMOVAL OF OIL FROM METALS BY PLASMA TECHNIQUES
    BELKIND, A
    KROMMENHOEK, S
    LI, H
    ORBAN, Z
    JANSEN, F
    [J]. SURFACE & COATINGS TECHNOLOGY, 1994, 68 : 804 - 808
  • [9] BELKIND A, 1996, MET FINISH, V94, P19, DOI DOI 10.1016/0026-0576(96)81354-7
  • [10] Improvement of the polyimide surface wettability using SiOx films deposited in a DECR reactor from HMDSO/O2 mixtures
    Bellel, A
    Sahli, S
    Raynaud, P
    Segui, Y
    Ziari, Z
    Eschaich, D
    Dennler, G
    [J]. PLASMA PROCESSES AND POLYMERS, 2005, 2 (07) : 586 - 594