Design, fabrication and testing of microlens arrays for sensors and microsystems

被引：377

作者：

Nussbaum, P ^{[1
]}

Volke, R ^{[1
]}

Herzig, HP ^{[1
]}

Eisner, M ^{[1
]}

Haselbeck, S ^{[1
]}

机构：

[1] UNIV ERLANGEN NURNBERG,D-95108 ERLANGEN,GERMANY

来源：

PURE AND APPLIED OPTICS | 1997年 / 6卷 / 06期

关键词：

D O I：

10.1088/0963-9659/6/6/004

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (mu TAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.

引用

页码：617 / 636

页数：20

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