Sol-gel derived aluminum doped zinc oxide for application as anti-reflection coating in terrestrial silicon solar cells

被引:91
作者
Verma, Amita [1 ]
Khan, F. [1 ]
Kumar, D. [1 ]
Kar, M. [1 ]
Chakravarty, B. C. [1 ]
Singh, S. N. [1 ]
Husain, M. [2 ]
机构
[1] Natl Phys Lab, Elect Mat Div, New Delhi 110012, India
[2] Jamia Milia Islamia, Dept Phys, New Delhi 110025, India
关键词
Sol-gel; Aluminum doped zinc oxide films; Silicon solar cells; X-ray diffraction; Electrical properties and measurements; Antirefection coatings; Optical properties; ZNO THIN-FILMS; OPTICAL-PROPERTIES; AMORPHOUS-SILICON; SPRAY-PYROLYSIS; TRANSPARENT; TEMPERATURE; DEPOSITION; BEHAVIOR;
D O I
10.1016/j.tsf.2009.08.010
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sol-gel grown polycrystalline Al doped zinc oxide (AZO) thin films have been deposited on Si wafers, microscopy slide glass and fluorine doped tin oxide coated glass substrates using the spin coating technique. The atomic ratio of Al:Zn in the films is 0.2. From the X-ray diffraction investigations it is found that the preferential growth of (100) reflection peak has taken place in the 450, 550 and 600 degrees C annealed films. Scanning electron microscopic study has shown that the films contain well-defined grains arranged in a closely packed array. The resistivity of the 500 degrees C annealed film is measured to be 5 x 10(-1) Omega cm. The films have exhibited excellent optical transmittance (similar to 90%) in the 400-1100 nm wavelength range. Refractive indices (n =1.9-1.95) of the films on Si wafer are independent of the annealing temperature. Thickness of the films produced at 4000 rpm is in the range of 58-62 nm. The refractive index and thickness of these films are nearly appropriate to cause destructive interference after reflection from front emitters of solar cells. These films have demonstrated a reflectivity value of about 3% at a wavelength of 700 nm. The AZO coated silicon solar cells possess V(oc) and I(sc) values of 573 mV and 237 mA, respectively. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:2649 / 2653
页数:5
相关论文
共 26 条
[1]   Epitaxial ZnO piezoelectric thin films for saw filters [J].
Emanetoglu, NW ;
Gorla, C ;
Liu, Y ;
Liang, S ;
Lu, Y .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 1999, 2 (03) :247-252
[2]   DEPOSITION OF ALUMINUM DOPED ZINC-OXIDE THIN-FILMS BY SPRAY PYROLYSIS [J].
GOYAL, D ;
SOLANKI, P ;
MARATHE, B ;
TAKWALE, M ;
BHIDE, V .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (2A) :361-364
[3]   Transparent conducting ZnO thin films prepared by XeCl excimer laser ablation [J].
Hiramatsu, M ;
Imaeda, K ;
Horio, N ;
Nawata, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (02) :669-673
[4]   TEXTURED FLUORINE-DOPED ZNO FILMS BY ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION AND THEIR USE IN AMORPHOUS-SILICON SOLAR-CELLS [J].
HU, JH ;
GORDON, RG .
SOLAR CELLS, 1991, 30 (1-4) :437-450
[5]   Room-temperature ultraviolet nanowire nanolasers [J].
Huang, MH ;
Mao, S ;
Feick, H ;
Yan, HQ ;
Wu, YY ;
Kind, H ;
Weber, E ;
Russo, R ;
Yang, PD .
SCIENCE, 2001, 292 (5523) :1897-1899
[6]   Ferroelectric behavior of Li-doped ZnO thin films on Si(100) by pulsed laser deposition [J].
Joseph, M ;
Tabata, H ;
Kawai, T .
APPLIED PHYSICS LETTERS, 1999, 74 (17) :2534-2536
[7]   Modified Thornton model for magnetron sputtered zinc oxide:: film structure and etching behaviour [J].
Kluth, O ;
Schöpe, G ;
Hüpkes, J ;
Agashe, C ;
Müller, J ;
Rech, B .
THIN SOLID FILMS, 2003, 442 (1-2) :80-85
[8]   Zinc oxide thin films by the spray pyrolysis method [J].
Krunks, M ;
Mellikov, E .
THIN SOLID FILMS, 1995, 270 (1-2) :33-36
[9]   Effects of doping concentration and annealing temperature on properties of highly-oriented al-doped ZnO films [J].
Kuo, SY ;
Chen, WC ;
Lai, FI ;
Cheng, CP ;
Kuo, HC ;
Wang, SC ;
Hsieh, WF .
JOURNAL OF CRYSTAL GROWTH, 2006, 287 (01) :78-84
[10]   ZnO Schottky ultraviolet photodetectors [J].
Liang, S ;
Sheng, H ;
Liu, Y ;
Huo, Z ;
Lu, Y ;
Shen, H .
JOURNAL OF CRYSTAL GROWTH, 2001, 225 (2-4) :110-113