The design and operation of a MEMS differential scanning nanocalorimeter for high-speed heat capacity measurements of ultrathin films

被引:81
作者
Olson, EA [1 ]
Yu, M
Efremov, Y
Zhang, M
Zhang, ZS
Allen, LH
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Coordinated Sci Lab, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
calorimetry; membranes; microelectromechanical; systems; microsensors; nanoparticles; plastic films; thin films;
D O I
10.1109/JMEMS.2003.811755
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A MEMS sensor has been developed for use as a calorimetric cell in an ultra-sensitive, thin-film, differential scanning calorimetric technique. The sensor contains a freestanding, thin (30 nm to 1000 nm), low-stress silicon nitride membrane with lateral dimensions of a few millimeters. This membrane, along with a thin (50 mu) metallization layer, forms a calorimetric cell with an exceptionally small addenda. This small addenda creates a very sensitive calorimetric cell, able to make heat capacity measurements of nanometer-thick metal and polymer films. The sensor fabrication and various design considerations are discussed in detail. The calorimetric technique and examples of applications are described.
引用
收藏
页码:355 / 364
页数:10
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