Dielectric properties of plasma-spray-deposited BaTiO3 and Ba0.68Sr0.32TiO3 thick films

被引：10

作者：

Ahn, K ^{[1
]}

Wessels, BW

Sampath, S

机构：

[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA

[2] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 2003年 / 18卷 / 05期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1557/JMR.2003.0168

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The dielectric properties of high-k dielectric BaTiO3 and Ba0.68Sr0.32TiO3 thick films deposited on alumina substrates using a plasma-spray process were investigated. The as-deposited films were predominantly crystalline but contained an amorphous second phase, the amount of which depended on spray conditions. The effect of the spray conditions on crystallinity was studied and related to the dielectric properties of the films. The presence of a low dielectric constant interfacial layer in plasma-spray-deposited films was determined from the dependence of the dielectric constant on film thickness. After annealing at 500 degreesC for 20 h in air, the crystallinity and dielectric constant increased. Annealing was-also found to affect the interfacial layer properties.

引用

页码：1227 / 1231

页数：5

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