Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage

被引：6

作者：

Fluegge, Jens ^{[1
]}

Koening, Rainer ^{[1
]}

Schoetka, Eugen ^{[1
]}

Weichert, Christoph ^{[1
]}

Koechert, Paul ^{[1
]}

Bosse, Harald ^{[1
]}

Kunzmann, Horst ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

OPTICAL ENGINEERING | 2014年 / 53卷 / 12期

关键词：

length metrology; traceability; interferometry; encoder system; line scale; photomask;

D O I：

10.1117/1.OE.53.12.122404

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The paper describes recent improvements of Physikalisch-Technische Bundesanstalt's (PTB) reference measuring instrument for length graduations, the so-called nanometer comparator, intended to achieve a measurement uncertainty in the domain of 1 nm for a length up to 300 mm. The improvements are based on the design and realization of a new sample carriage, integrated into the existing structure and the optimization of coupling this new device to the vacuum interferometer, by which the length measuring range of approximately 540 mm with sub-nm resolution is given. First, measuring results of the enhanced nanometer comparator are presented and discussed, which show the improvements of the measuring capabilities and verify the step toward the sub-nm accuracy level. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：5

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