The influence of surface structure on diffusion and passivation in multicrystalline silicon solar cells textured by metal assisted chemical etching (MACE) method

被引：42

作者：

Dai, Xiaowan ^{[1
]}

Jia, Rui ^{[1
]}

Su, Guoyu ^{[2
,3
]}

Sun, Hengchao ^{[1
]}

Tao, Ke ^{[1
]}

Zhang, Chao ^{[1
]}

Zhang, Pengfei ^{[1
]}

Jin, Zhi ^{[1
]}

Liu, Xinyu ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Microelect, 3 Bei Tu Cheng West Rd, Beijing 100029, Peoples R China

[2] Jiangsu R&D Ctr Internet Things, 200 Ling Hu Ave, Wuxi 214028, Jiangsu, Peoples R China

[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2018年 / 186卷

基金：

中国国家自然科学基金;

关键词：

Metal assisted chemical etching; Multicrystalline silicon solar cells; Diffusion; Passivation; BLACK-SILICON; POROUS SILICON;

D O I：

10.1016/j.solmat.2018.06.011

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

It is important to improve the efficiency of solar cells textured by the MACE method, and the surface morphology has a significant effect on the efficiency. In this paper, we textured multicrystalline wafer using MACE method, and the surface morphology was further modified by post-etching process to achieve high efficiency. The influence of structure on diffusion and surface passivation was studied. It reveals that surface structure has a big effect on diffusion and passivation, thus affecting the efficiency. Structure with large aspect ratio results in heavily doped regions and poor passivation performance. Finally, large area solar cells with the efficiency of 19.08% and 19.11% were obtained on slurry wire and diamond wire saw multicrystalline wafer respectively, which is 0.5% and 0.8% absolutely higher than the cells with traditional acid texturing.

引用

页码：42 / 49

页数：8

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