The use of electron holography for composition profiling of semiconductor heterostructures

被引：0

作者：

Midgley, PA ^{[1
]}

Barnard, J ^{[1
]}

Cherns, D ^{[1
]}

机构：

[1] Univ Bristol, HH Wills Phys Lab, Bristol BS8 1TL, Avon, England

来源：

MICROSCOPY OF SEMICONDUCTING MATERIALS 1997 | 1997年 / 157期

关键词：

D O I：

暂无

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The possibility of applying off-axis electron holography in a FEGTEM to determine the composition profile of semiconductor heterostructures has been investigated. This paper reviews how to record a hologram, its subsequent processing and phase reconstruction. It is shown how a phase change can be related to a change in the mean inner potential and thus to a change in composition. An analysis of a Si1-xGex quantum dot structure is given as an example of how quantitative composition profiles can be obtained at nanometre resolution.

引用

页码：75 / 78

页数：4

共 6 条

[1]

Chen J., 1995, Electron Holography. Proceedings of the International Workshop on Electron Holography, P81, DOI 10.1016/B978-044482051-8/50009-9

[2] 20 FORMS OF ELECTRON HOLOGRAPHY [J].

COWLEY, JM .

ULTRAMICROSCOPY, 1992, 41 (04) :335-348

[3] MICROSCOPY BY RECONSTRUCTED WAVE-FRONTS [J].

GABOR, D .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1949, 197 (1051) :454-+

[4] ACCURATE MEASUREMENTS OF MEAN INNER POTENTIAL OF CRYSTAL WEDGES USING DIGITAL ELECTRON HOLOGRAMS [J].

GAJDARDZISKAJOSIFOVSKA, M ;

MCCARTNEY, MR ;

DERUIJTER, WJ ;

SMITH, DJ ;

WEISS, JK ;

ZUO, JM .

ULTRAMICROSCOPY, 1993, 50 (03) :285-299

[5] RECONSTRUCTION OF ELECTRON OFF-AXIS HOLOGRAMS - A NEW AND FAST ALTERNATIVE METHOD [J].

LEHMANN, M ;

VOLKL, E ;

LENZ, F .

ULTRAMICROSCOPY, 1994, 54 (2-4) :335-344

[6]

SAUNDERS M, IN PRESS P 15 PFEFF

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